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Deposition and Etching of Tantalum on Lithium Niobate for High Q Resonators

The deposition and etching of tantalum on lithium niobate to achieve high Q resonators is a problem that needs to be solved. The author is seeking advice on how to proceed with this process, indicating a lack of existing solutions or clear methodologies. This challenge is relevant to the field of materials science and engineering.

Engineering, Core Engineering, Materials Science